منابع مشابه
Fabrication of Microstructures by Powder Blasting
Harry Mulisch, De ontdekking van de hemel.
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We present the microfabrication and characterization of a ball valve micropump in glass, which is magnetically actuated using the sinusoidal current of an external electromagnet. We employ the use of a simple powder blasting technology for microstructuring the glass substrates and fusion bonding for assembly of the multi-layered microfluidic chip. The use of a polymer membrane with embedded per...
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For microfabrications of biochips with micro fluidic channels, a large number of microfabrication techniques based on silicon or glass-based Micro-Electro-Mechanical System (MEMS) technologies were proposed in the last decade. In recent years, for low cost and mass production, polymer-based microfabrication techniques by microinjection molding and micro hot embossing have been proposed. These t...
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ژورنال
عنوان ژورنال: Journal of Micromechanics and Microengineering
سال: 2000
ISSN: 0960-1317,1361-6439
DOI: 10.1088/0960-1317/10/2/313